中心簡介 Introduction🕵🏼：

   意昂3平台上海市超精密運動控製與檢測工程研究中心成立於2019年🌕，是上海市發改委首批省部級工程研究中心。中心面向國家重大需求🈲👩🏻‍🎤，以半導體製造與檢測裝備開發為背景，開展人工智能檢測方法、精密減振與振動抑製技術、超精密運動控製算法、高真空傳輸機械手技術🫃🏽、光學位移傳感器與檢測方法😡、壓電陶瓷電機建模與控製等基礎理論和工程應用的研究，取得創新性成果。中心在上海寶山、新江灣城灣谷擁有超2000平方米的研發和辦公場地👀，為師生們創造國際一流的學習和科研環境👷🏽‍♀️。中心招收控製科學與工程🚴🏼、機械工程🙆、電氣工程🥝、光學工程（激光）、精密儀器與測量等多學科的優秀學子，為集成電路裝備領域培養復合式人才👩🏿‍🏫。

Shanghai Engineering Research Center of Ultra-Precision Motion Control and Measurement, Fudan University, is the first batch of ministerial and provincial-level engineering research center of the Shanghai Development and Reform Commission. Established in 2019. With the development of semiconductor manufacturing and measurement equipment from grand-scale development of national key requirements, the Center copes with basic research and applications on artificial intelligence wafer detection, high-precision vibration absorption and elimination, ultra-precision motion control, high-vacuum wafer transmission robot, optic displacement sensors, and measurement, modeling, and control theory of piezoelectric ceramics motors, etc., and these researches have made creative contributions. The Center has more than 2,000m2 research workplaces and offices in Baoshang District and Wangu Science Park, New Jiangwan City, Yangpu District, providing outstanding learning and research for faculties and students. The Center welcomes all candidates in research fields, including control science and engineering, mechanical engineering, electrical engineering, optical engineering (laser measurement), precise instrument and measurements, etc.. The Center provides interdisciplinary talents for IC manufacturing and measurement equipment fields.

組織架構 Organizational Structure and Team

中心技術委員會主任：柴天佑院士

Chair of Technical Board : Cai Tianyou, CAE

中心主任：楊曉峰

Chair of Center: Yang Xiaofeng

中心副主任：丁晨陽 張誌平

Vice Chair: Ding Chengyang, Zhang Zhiping

核心成員：車仁超 劉玉平 孫煜 付雪微 於健博 康華洲

Key Members: Che Renchao, Liu Yuping, Sun Yu, Fu Xuewei, Yu Jianbo, Kang Huazhou

學生團隊 Student Members

       中心在讀博士研究生18名，碩士研究生8名

Center currently has 18 doctorate postgraduate candidates and 8 master postgraduate candidates.

研究方向及內容 Contents and Directions🦇：

       本中心圍繞高端半導體裝備所需的超精密運動控製與檢測技術為核心研究內容

Center focuses on ultra-precision motion control and measurement for high-end semiconductor equipment.

建設目標 Objectives

       成為面向半導體設備領域工程化研究與開發、突破行業共性與關鍵技術🧏🏻‍♂️、促進行業科技成果的轉移👸🏼🏄🏻、輻射和擴散⚉、引領半導體設備行業技術進步的戰略性產業技術創新平臺。

To become a strategic innovation platform for engineering research and development in the field of semiconductor equipment, the center breaks through industries commonalities and technologies, promotes the transfer, radiation, and diffusion of industry scientific and technological achievements, and leads the technological progress in the semiconductor equipment industry areas.

建設進展及主要成果 Construction Progress and Representative Achievements➰：

中心建設進展 Construction Progress

1. 中心圍繞超精密運動控製與檢測技術核心研究內容，建立了振動動力學實驗室、運動控製實驗室、特種電機實驗室、光學檢測實驗室與人工智能檢測實驗室，擁有各類運動實驗平臺🦸🏻‍♂️、快速原型開發工具（dSpace、Speedgoat）☹️、振動測試儀、激光幹涉儀、數碼顯微系統等超精密運動控製與檢測所需設備或儀器🧑‍🦽‍➡️，為培養學生理論與實際動手能力提供了國際先進的實驗條件；

   Regarding the essential research contents of ultra-precision motion control and measurement, the Center has set up a vibration and dynamics laboratory, motion control laboratory, distinct motor laboratory, optic measurement laboratory, and AI measurement laboratory. The Center has various equipment or instruments for ultra-precision motion control and measurement, such as motion experiment platforms, rapid prototyping systems (dSpace, Speedgoat), vibration measure systems, laser interferometer, digital lenses, etc. The Center provides world-class experimental conditions for theoretical and practical engineering abilities in cultivating postgraduate candidates.

2. 與國內半導體裝備龍頭企業建立了緊密的產學研合作關系👳🏻，形成了良性閉環🥸，建立了學生實踐基地；

   The center has strong connections with top national companies in semiconductor equipment. We have a virtuous closed loop and have established a student practice base.

3. 承擔國家科技重大專項1項，國家重點研發計劃3項、國家自然科學基金3項、上海市重大項目1項、省級重大項目1項🤷🏿‍♂️，校企合作重大項目3項，發表學術論文36篇👨🏼‍🔬，申請專利40項等👎🏼。

   The center has undertaken 1 National Science and Technology Major Project, 3 National Key Research and Development Program of China, 3 National Natural Science Foundation of China, 1 Major Project of Shanghai, 1 Provincial-Level Major Project, 3 Campus-Enterprise Cooperation Projects. The center has 36 research papers and 40 patents.

主要研究成果 Research Achievements

1. 運動控製實驗室圍繞半導體裝備納米級運動定位控製，設計研製了各類精密實驗運動平臺🤸🏻‍♂️，並基於平臺驗證了同步控製🔄、前反饋控製、滑模控製、迭代學習控製等各類先進控製方法。

   The Motion Control Laboratory has focused on nano-level motion positioning control for semiconductor equipment. The lab has designed and developed various precision experimental motion platforms, which serve as testbeds for validating advanced control methodologies, including synchronized control, feedforward control, sliding mode control, and iterative learning control.

   

   
   

2. 光學檢測實驗室圍繞半導體裝備運動超高分辨率定位檢測，在雙頻激光幹涉儀測量、波長補償開展研究🦎，研發出了亞納米分辨率光纖導入式光柵測量系統並得到了應用。

   The Optical Detection Laboratory focuses on ultra-high-resolution positioning detection for semiconductor equipment. The lab conducts research in dual-frequency laser interferometry and wavelength compensation, and has developed a fiber-coupled grating measurement system with sub-nanometer resolution, which has been successfully applied in practical settings.

   

   
   

3. 人工智能檢測實驗室圍繞半導體量檢測裝備的圖形化數據檢測🧑🏼‍🚒，基於人工智能驅動算法，成功對半導體檢測環節的多種圖像化表面缺陷進行了檢測，開發的算法在半導體量檢測設備中獲得應用🚵🏿。

   The AI Detection Laboratory focuses on the instrument and measurement of various types of data related to semiconductor measurement equipment. Utilizing AI-driven algorithms, the laboratory has successfully performed quantitative detection of critical dimensions and various image-based surface defects in the semiconductor inspection process. The algorithms developed have been successfully implemented in semiconductor measurement equipment.

   

   
   

4. 振動動力學實驗室圍繞半導體裝備動態減振隔振，開展了半導體裝備減振系統辨識、傳感器/執行器布局優化、動力學分析、振動控製算法等工作。

   The Vibration Dynamics Laboratory focuses on dynamic vibration isolation and reduction for semiconductor equipment. The lab conducts work in system identification for vibration reduction systems in semiconductor equipment, optimization of sensor and actuator placement, dynamic analysis, and the development of vibration control algorithms.

   

   
   

5. 特種電機實驗室圍繞半導體裝備驅動核心零部件，在微步壓電陶瓷電機🦹🏻、磁阻電機等高精度電機方面🙍🏽‍♀️，對電機機理💬🤷🏼‍♀️、磁滯、蠕變等非線性開展了建模理論與控製方法研究🦸🏻。

   The Specialized Motor Laboratory focuses on the core drive components of semiconductor equipment, particularly high-precision motors such as micro-stepping piezoelectric motors and reluctance motors. The lab conducts research on modeling theories and control methods related to motor mechanisms, as well as nonlinear phenomena such as hysteresis and creep.

   

   
   

代表性成果 Representative Achievements

1. Xuewei Fu, Xiaofeng Yang, Pericle Zanchetta, Mi Tang, Yang Liu and Zhenyu Chen. An Adaptive Data-Driven Iterative Feedforward Tuning Approach Based on Fast Recursive Algorithm: With Application to a Linear Motor[J]. IEEE Transactions on Industrial Informatics, 2023 (SCI/IF=12.3, 中科院1區)

2. Xinyi Su, Yunlang Xu, Xiaofeng Yang. Neural network adaptive sliding mode control without overestimation for a maglev system[J].Mechanical Systems and Signal Processing, 2022 (SCI/IF=8.4, 中科院1區)

3. Siyi Yu, Weike Liu, Xiaofeng Yang, Feng Shu. Quadrature Sinusoidal Signals Correction of Magnetic Encoders via Radial Basis Function Neural Network and Adaptive Loop Shaping[J]. IEEE Transactions on Industrial Electronics, 2023 (SCI/IF=7.7, 中科院1區)

4. Huazhou Kang, Zhi Li, Yu Sun, Qiufeng Yu, Xiaofeng Yang. Model of the longitudinal-shear piezoelectric inchworm motor in shear movement[J], International Journal of Mechanical Sciences, 2024 (SCI/IF=7.3, 中科院1區)

5. Jianbo Yu, Xuefeng Yan. Whole process monitoring based on unstable neuron output information in hidden layers of deep belief network[J]. IEEE transactions on cybernetics, 2020 (SCI/IF=19.1, 中科院1區)